Полировочные жидкости (суспензии)
a) ANJI Microelectronics Technology Co. (China):
- CMP AEP-T800
- CMP AEP-D2000E
b) Tianjin XIMEI Semiconductor Co.Ltd. (China) –www.ximeitec.com :
- CMP S800
- CMP S810
c) Beijing GRISH Hitech Co. (China):
- CMP Slurry